WebAug 3, 2024 · Deep reactive-ion etching (DRIE) is commonly used for high aspect ratio silicon micromachining. However, scalloping, which is the result of the alternating Bosch process of DRIE, can cause many problems in the subsequent process and degrade device performance. In this work, we propose a simple and effective method to smoothen the … WebLife at JM Apply Now FIND A PRODUCT ; Contact Us. About us. About us. Catalysing the net zero transition. Our strategy. Sites and locations in. 30+ countries around the world. People. 13,000+ 2024/22. Experience. 205 . year history. Inspiring science, enhancing life.
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